Led color displays with multi-led sub-pixels

ABSTRACT

A multi-color LED display comprises pixels, each comprising a first sub-pixel, a second sub-pixel, and a third sub-pixel. The first sub-pixel comprises a first light-emitting diode (LED) that emits a first color of light, the second sub-pixel comprises second LEDs that emit a second color of light different from the first color of light, and the third sub-pixel comprises third LEDs that emit a third color of light different from the first color of light and different from the second color of light. The second LEDs are electrically connected in parallel and the third LEDs are electrically connected in series.

CROSS REFERENCE TO RELATED APPLICATION

Reference is made to U.S. Pat. No. 10,453,826, entitled Voltage-BalancedSerial ILED Pixel and Display, the disclosure of which is incorporatedherein by reference in its entirety.

TECHNICAL FIELD

The present disclosure relates to displays with light-emitting diodepixels.

BACKGROUND

Large-format inorganic light-emitting diode (iLED) displays are used inoutdoor and stadium displays. Because the iLEDs are relatively large,for example one square millimeter in size, they are restricted torelatively low-resolution displays. However, as iLED technologydevelops, there is increasing interest in applying smaller iLEDs todisplays having higher resolution. Full-color displays typically includepixels with three (or more) emitters, usually red, green, and blueemitters (and sometimes others, like yellow emitters), distributed in anarray over the display surface. For example, inorganic light-emittingdiodes used in flat-panel displays are disclosed in U.S. Pat. No.9,818,725 entitled Inorganic-Light-Emitter Display with Integrated BlackMatrix.

Inorganic light-emitting diodes are semiconductor light sources relyingon p-n junctions to emit light when a suitable voltage is applied acrossthe light-emitting diode. The color of the light emitted from the iLEDcorresponds to the energy bandgap of the semiconductor used. Thus,different semiconductor materials can produce different colors of lightwhen stimulated with suitable voltages. Typical materials include InGaN(emitting blue light), AlGaP (emitting green light), and AlGaAs(emitting red light), among many other materials, including quaternarycompounds of III-V and II-VI group elements. Generally,blue-light-emitting materials can emit light at voltages ranging from2.5-3.7 volts, green-light-emitting materials can emit light at voltagesranging from 1.9-4 volts, and red-light-emitting materials can emitlight at voltages ranging from 1.6-2 volts, for example as taught inU.S. Pat. No. 10,453,826, entitled Voltage-Balanced Serial ILED Pixeland Display. Moreover, the efficiency with which the different materialsemit light can depend on the density of the current passing through thematerials.

SUMMARY

In order to provide the different voltages and currents needed by thedifferent light-emitting diodes emitting different colors of light in afull-color pixel, a separate power supply can supply power, ground, andcontrol signals to each color light emitter in each multi-color pixel.By supplying the appropriate voltages and currents to each lightemitter, the light emitters efficiently emit light. However, providingthree (or more) different power, ground, and control signals to eachmulti-color pixel requires three times as many power supplies, lines,and connections, reducing the available space in the display andincreasing costs.

Alternatively, a single power supply can provide power to all threedifferent iLEDs in the full-color pixels. In this case any excessvoltage is dropped across other circuit components, increasing heat andreducing overall display system power efficiency.

The present disclosure provides displays and pixel structures withreduced circuitry that can have improved power efficiency. According tosome embodiments of the present disclosure, a multi-color light-emittingdiode (LED) display comprises pixels that each comprise a firstsub-pixel, a second sub-pixel, and a third sub-pixel. The firstsub-pixel comprises a first light-emitting diode (LED) that emits afirst color of light, the second sub-pixel comprises second LEDs thatemit a second color of light different from the first color of light,and the third sub-pixel comprises third LEDs that emit a third color oflight different from the first color of light and different from thesecond color of light. The second LEDs are electrically connected inparallel and the third LEDs are electrically connected in series.

In some embodiments, the first sub-pixel comprises one or more (e.g.,two) first LEDs and at least two of the first LEDs are electricallyconnected in series, at least two second LEDs are electrically connectedin parallel, and at least two third LEDs are electrically connected inseries. In some embodiments, the first sub-pixel comprises more than twofirst LEDs and at least two of the first LEDs are electrically connectedin series. In some embodiments, all of the first LEDs are electricallyconnected in series. In some embodiments, the second sub-pixel comprisesmore second LEDs than the first sub-pixel comprises first LEDs and thethird sub-pixel comprises more third LEDs than the first sub-pixelcomprises first LEDs. In some embodiments, the third sub-pixel comprisesmore third LEDs than the second sub-pixel comprises second LEDs. In someembodiments, at least two of the first LEDs are electrically connectedin parallel, more than two second LEDs are electrically connected inparallel, and more than two third LEDs are electrically connected inseries. In some embodiments, three third LEDs are electrically connectedin parallel, four third LEDs are electrically connected in parallel, orall of the third LEDs are electrically connected in parallel, or anycombination of these.

In some embodiments, the one or more first LEDs are more efficient thanthe second LEDs and the second LEDs are more efficient than the thirdLEDs at any current or current density or at a given current or currentdensity. As used herein, an efficiency for any one or more of the first,second, or third LEDs can be a ratio of the number or energy of thephotons emitted from an LED to the electrical power used by the LED(e.g., Watts). Efficiency can be the LED external or internal quantumefficiency. Efficiency can be a current efficiency or the efficiencywith which an LED transforms electrical current or electrical power intolight. A current density is a ratio of the current passing through alight-emitting area or volume of an LED to the light-emitting area orvolume of the LED.

One or more first LEDs can each have a first efficiency that is currentdependent, the second LEDs can each have a second efficiency that iscurrent dependent, and the third LEDs can each have a third efficiencythat is current dependent and the first, second, and third efficienciescan each be different at any or all currents. The first, second, andthird efficiencies can each have a maximum value at a finite, positive,non-zero value and the first, second, and third efficiency maximums caneach be different. According to embodiments, the second efficiencyreaches a maximum (the second efficiency maximum) at a smaller currentor current density than the current at which the first efficiencyreaches a maximum (the first efficiency maximum). According toembodiments, the third efficiency reaches a maximum (the thirdefficiency maximum) at a larger current or current density than thesecond efficiency. According to embodiments, the third efficiencyreaches a maximum at a larger current or current density than thecurrent at which the first efficiency reaches a maximum.

According to some embodiments of the present disclosure, a multi-colorLED display comprises pixels. Each of the pixels comprises a firstsub-pixel, a second sub-pixel, and a third sub-pixel. The firstsub-pixel comprises a first light-emitting diode (LED) that emits afirst color of light, the second sub-pixel comprises a second LED thatemits a second color of light different from the first color of light,and the third sub-pixel comprises a third LED that emits a third colorof light different from the first color of light and different from thesecond color of light. The first LED has a first light-emitting area orvolume, the second LED has a second light-emitting area or volume, andthe third LED has a third light-emitting area or volume. The secondlight-emitting area or volume can be larger than the firstlight-emitting area or volume and the third light-emitting area orvolume can be smaller than the first light-emitting area or volume orsmaller than the second light-emitting area or volume, or both. Thus, insome embodiments, the second LED is larger than the first LED, the firstLED is larger than the third LED, or both. In some embodiments, (i) theratio of the second light-emitting area or volume to the firstlight-emitting area or volume is dependent on the ratio of the firstefficiency maximum to the second efficiency maximum, (ii) the ratio ofthe second light-emitting area or volume to the first light-emittingarea or volume is dependent on the ratio of the first efficiency maximumto the second efficiency maximum, or (iii) both (i) and (ii).

According to some embodiments, the second sub-pixel comprises two secondLEDs and the two second LEDs are electrically connected in parallel.According to some embodiments, the second sub-pixel comprises threesecond LEDs and the three second LEDs are electrically connected inparallel.

According to some embodiments, the third sub-pixel comprises two thirdLEDs and the two third LEDs are electrically connected in series.According to some embodiments, the third sub-pixel comprises three thirdLEDs and the three third LEDs are electrically connected in series.According to some embodiments, the third sub-pixel comprises four thirdLEDs and the four third LEDs are electrically connected in seriesAccording to some embodiments, the third sub-pixel comprises five thirdLEDs and the five third LEDs are electrically connected in series.According to some embodiments, the third sub-pixel comprises six thirdLEDs and the six third LEDs are electrically connected in series.

Multi-color displays according to some embodiments of the presentdisclosure can comprise inorganic LEDs (iLEDs), for example micro-iLEDs.Any one or more of the first, second, and third LEDs can be micro-LEDswith a width or length that is no greater than 500 microns (e.g., nogreater than 200 microns, no greater than 100 microns, no greater than50 microns, no greater than 25 microns, no greater than 15 microns, nogreater than 12 microns, no greater than 8 microns, or no greater than 5microns). The first, second, and third LEDs can have or be differentsizes, for example the first LED can be a different size from the secondand the third LEDs, the second LEDs can be a different size from thefirst and the third LEDs, and the third LEDs can be a different sizefrom the first and the second LEDs. In some embodiments, the first,second, and third LEDs are all different sizes, for example the secondLED is larger than the first LED and the third LED is smaller than thefirst LED.

According to some embodiments of the present disclosure, the first oneor more LEDs are blue LEDs that emit blue light, the second LEDs aregreen LEDs that emit green light, and the third LEDs are red LEDs thatemit red light.

According to some embodiments of the present disclosure, (i) the firstLED comprises a first compound semiconductor and the third LEDs comprisea compound semiconductor that is different from the first compoundsemiconductor, (ii) the second LEDs comprise a second compoundsemiconductor and the third LEDs comprise a compound semiconductor thatis different from the second compound semiconductor, (iii) the first LEDand the second LEDs comprise a common compound semiconductor, or (iv)any one or combination of (i), (ii), and (iii).

In some embodiments of the present disclosure, a multi-color displaycomprises a controller that controls the first LED, the second LEDs, andthe third LEDs, and the controller provides a voltage and current toeach of the first LED, the second LEDs, and the third LEDs. In someembodiments, the controller provides control signals to the first LED,the second LEDs, and the third LEDs. The controller can be a displaycontroller that provides electrical signals to each of the first,second, and third LEDs. The controller can be a plurality of pixelcontrollers that each provides electrical signals to each of the first,second, and third LEDs in a pixel. Pixel controllers can be controlledby a display controller and the controller can comprise a displaycontroller in combination with multiple pixel controllers.

According to embodiments of the present disclosure, a voltage providedto each individual third LED is less than the voltage provided to eachof the first or second LEDs, is no greater than one half the voltageprovided to each of the first or second LEDs, is no greater than onethird the voltage provided to each of the first or second LEDs, or is nogreater than one quarter of the voltage provided to each of the first orsecond LEDs. According to embodiments, the voltage provided to the firstsub-pixel, the second sub-pixel, and the third sub-pixel is a samecommon voltage, but the voltage provided to each individual third LED isless than the voltage provided to each individual first LED or secondLED or both first and second LEDs. In some embodiments, a common voltageis supplied to every sub-pixel in a pixel, for example a common voltageis provided to first, second, and third sub-pixels and, for example, tothe sub-pixels of every pixel in display.

Similarly, according to embodiments of the present disclosure, a commoncurrent is provided to every sub-pixel in one or more pixels, forexample a common current is provided to first, second, and thirdsub-pixels 31, 32, 33 in all pixels 20 in display 99. However, becauseone or more sub-pixels can each comprise multiple LEDs electricallyconnected in parallel, the current provided to each parallel-connectedLED in a sub-pixel can be less than the common current provided to everysub-pixel in a pixel. For example, in some embodiments the currentprovided to each of the first LEDs is no less than twice the currentprovided to each of the second LEDs. In some embodiments the currentprovided to each of the third LEDs is no less than twice the currentprovided to each of the first or second LEDs. In some embodiments thecurrent provided to each of the third LEDs is no less than three timesthe current provided to each of the first or second LEDs. In someembodiments the current provided to each of the third LEDs is no lessthan four times the current provided to each of the first or secondLEDs.

According to some embodiments of the present disclosure, a display orpixel controller provides a current source at a fixed voltage to one orany combination of the first LED, the second LEDs, and the third LEDs,and the quantity of light emitted by the first LED, the second LEDs, andthe third LEDs is controlled by the current provided to the first LED,the second LEDs, and the third LEDs, respectively. The display or pixelcontroller can provide temporally modulated current at a fixed quantity,for example in a pulse width modulation configuration to emit differentamounts of light over time.

According to embodiments of the present disclosure, a multi-colordisplay comprises a display substrate, an array of pixels disposed onthe display substrate, and a controller connected to each of the pixelsto control the pixel. A separate controller (e.g., a pixel controller)can be connected to each of the pixels to control the pixel.

According to some embodiments, a pixel, for example a display pixel,comprises a first sub-pixel, a second sub-pixel, and a third sub-pixel,the first sub-pixel comprising a first light-emitting diode (LED) thatemits a first color of light, the second sub-pixel comprising secondLEDs that emit a second color of light different from the first color oflight, and the third sub-pixel comprising third LEDs that emit a thirdcolor of light different from the first color of light and differentfrom the second color of light. The second LEDs are electricallyconnected in parallel and the third LEDs are electrically connected inseries.

According to some embodiments, a pixel, for example a display pixel,comprises a first sub-pixel, a second sub-pixel, and a third sub-pixel,the first sub-pixel comprising a first light-emitting diode (LED) thatemits a first color of light, the second sub-pixel comprising a secondLED that emits a second color of light different from the first color oflight, and the third sub-pixel comprising a third LED that emits a thirdcolor of light different from the first color of light and differentfrom the second color of light. The second LED can be larger than thefirst LED. The first LED can be larger than the third LED. The size ofan LED can be defined by any one or combination of the length and widthof the LED, the light-emitting area, and the light-emitting volume ofthe LED.

Embodiments of the present disclosure provide a display and pixelcontrol with simplified power and control circuits requiring fewercomponents and electrical connections together with improvedlight-output efficiency, for example light emitted from inorganicmicro-light-emitting diodes.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing and other objects, aspects, features, and advantages ofthe present disclosure will become more apparent and better understoodby referring to the following description taken in conjunction with theaccompanying drawings, in which:

FIG. 1 is a schematic diagram and detail of a display according toillustrative embodiments of the present disclosure;

FIG. 2 is a schematic detail diagram of a pixel according toillustrative embodiments of the present disclosure;

FIG. 3 is a graph illustrating iLED light output efficiency with respectto current density useful in understanding embodiments of the presentdisclosure;

FIGS. 4-6 are schematic diagrams of pixels according to illustrativeembodiments of the present disclosure;

FIG. 7 is a schematic plan view of a display according to illustrativeembodiments of the present disclosure;

FIG. 8 is a flow chart illustrating exemplary methods of the presentdisclosure;

FIGS. 9-11 are cross sections of LEDs according to illustrativeembodiments of the present disclosure; and

FIG. 12 is a perspective of a display according to illustrativeembodiment of the present disclosure.

Features and advantages of the present disclosure will become moreapparent from the detailed description set forth below when taken inconjunction with the drawings, in which like reference charactersidentify corresponding elements throughout. In the drawings, likereference numbers generally indicate identical, functionally similar,and/or structurally similar elements. The figures are not drawn to scalesince the variation in size of various elements in the Figures is toogreat to permit depiction to scale.

DETAILED DESCRIPTION OF CERTAIN EMBODIMENTS

Certain embodiments of the present disclosure provide electricallyconnected iLEDs that have improved efficiency and simplified power andcontrol circuitry. Such electrically connected iLEDs can be sub-pixelsin one or more pixels in a display. In some embodiments, a power supplyfor a pixel (e.g., for all of the sub-pixels in a pixel together)provides any one or more of a single current supply, a single constantcurrent supply, and a single voltage supply. According to someembodiments of the present disclosure and as illustrated in FIG. 1, amulti-color LED display 99 comprises pixels 20 on a display substrate10. Pixels 20 can be arranged in an array 22, for example a regular,rectangular array, or in an irregular arrangement, and can comprise, forexample, first, second, and third sub-pixels 31, 32, 33 (collectivelysub-pixels 30), that each emit a different color of light at a desiredluminance in response to control signals provided by a displaycontroller 50 in display 99, for example in an active- or passive-matrixcontrol configuration. In a matrix configuration, each pixel 20 can becontrolled by row-control signals provided on row wire 24 and datasignals provided on column wire 26. Active-matrix pixels 20 can eachcomprise a pixel controller 52 that controls first, second, and thirdsub-pixels 31, 32, 33 with first, second, and third current controlsignals 61, 62, 63 in response to signals provided on power, 54, ground56, row wire 24, and column wire 26 signals. (A line with a relativelyheavier weighting in the Figures indicates a bus comprising multiplewires, for example multiple row wires 24 or multiple column wires 26electrically connected to display controller 50 or pixel controller 52.)

Display substrate 10 can have opposing parallel sides over or on one ofwhich pixels 20 are disposed. For example, display substrate 10 can be aflat-panel substrate found in the display industry such as a glass,polymer, ceramic, metal, sapphire, or quartz substrate.

First, second, and third sub-pixels 31, 32, 33, can each comprise one ormore light-emitting elements, such as inorganic light-emitting diodes(iLEDs 40). First sub-pixel 31 can comprise a first light-emitting diode(LED) 41 that emits a first color of light. Second sub-pixel 32 cancomprise second LEDs 42 that emit a second color of light different fromthe first color of light. Third sub-pixel 33 can comprise third LEDs 43that emit a third color of light different from the first color of lightand different from the second color of light. Second LEDs 42 can beelectrically connected in parallel and third LEDs 43 can be electricallyconnected in series.

In some embodiments of the present disclosure, first LED 41 is a blueLED that emits blue light, second LEDs 42 are green LEDs that emit greenlight, and third LEDs 43 are red LEDs that emit red light. In someembodiments, first, second, or third LEDs 41, 42, 43 can emit one ormore other colors of light, for example yellow or cyan light. In someembodiments, display 99 comprises fourth sub-pixels that emit colors oflight that are different from the colors of light emitted by first,second, or third LEDs 41, 42, 43, such as yellow or cyan light forexample. According to some embodiments of the present disclosure, secondLEDs 42 all emit substantially the same color of light (e.g., withinmanufacturing variability) and third LEDs 43 all emit substantially thesame color of light (e.g., within manufacturing variability).

As shown in FIG. 1, in some embodiments of the present disclosure, firstsub-pixel 31 comprises only a single first LED 41, second sub-pixel 32comprises only two second LEDs 42 electrically connected in parallel,and third sub-pixel 33 comprises only two third LEDs 43 electricallyconnected in series. As illustrated in FIG. 2, first sub-pixel 31comprises only a single first LED 41, second sub-pixel 32 comprises onlythree second LEDs 42 electrically connected in parallel, and thirdsub-pixel 33 comprises only three third LEDs 43 electrically connectedin series. More generally and as expressly contemplated herein, secondsub-pixel 32 can comprise any number of second LEDs 42 greater than oneand third sub-pixel 33 can comprise any number of third LEDs 43 greaterthan one, independent of the number of second LEDs 42. For example,second sub-pixel 32 can comprise two second LEDs 42 or three second LEDs42 and third sub-pixel 33 can comprise three third LEDs 43 or four thirdLEDs 43.

According to some embodiments of the present disclosure, first, second,and third LEDs 41, 42, 43 are micro-LEDs 40 with at least one of a widthand a length that is no greater than 500 microns (e.g., no greater than200 microns, no greater than 100 microns, no greater than 50 microns, nogreater than 25 microns, no greater than 15 microns, no greater than 12microns, no greater than 8 microns, or no greater than 5 microns).First, second, and third LEDs 41, 42, 43 can have different sizes.Micro-LEDs 40 provide an advantage according to some embodiments of thepresent disclosure since they are sufficiently small and can be disposedspatially close together so that the different micro-LEDs 40 in a pixel20 and sub-pixel 30 cannot be readily distinguished by the unaided humanvisual system in a display at a desired viewing distance, improvingcolor mixing of light emitted by a pixel 20 and sub-pixel 30 andproviding apparent improvements in display resolution. In someembodiments, a single common mask set can be used to construct all offirst, second, and third LEDs 41, 42, 43 and all of first, second, andthird LEDs 41, 42, 43 are the same size, reducing construction costs forpixels 20.

According to some embodiments, (i) first LED 41 comprises a firstcompound semiconductor, for example GaN or doped GaN, and third LEDs 43comprise a third compound semiconductor that is different from the firstcompound semiconductor, for example GaAs or doped GaAs, (ii) second LEDs42 comprise a second compound semiconductor, for example GaN or dopedGaN, and third LEDs 43 comprise a third compound semiconductor that isdifferent from the second compound semiconductor, for example GaAs ordoped GaAs, (iii) first LED 41 and second LEDs 42 comprise a commoncompound semiconductor, for example GaN or doped GaN, or (iv) any one orcombination of (i), (ii), and (iii).

Referring to FIGS. 1 and 2 and according to some embodiments of thepresent disclosure, display controller 50 (for example in apassive-matrix control configuration) or pixel controller 52 (forexample in an active-matrix control configuration) controls first LED41, second LEDs 42, and third LEDs 43 in at least one pixel (e.g., allpixels for a display controller in a passive-matrix controlconfiguration or a single pixel in an active-matrix controlconfiguration), provides a voltage and current to each of first LED 41,second LEDs 42, and third LEDs 43, and, optionally, provides a currentsource at a fixed voltage to one or any combination of first LED 41,second LEDs 42, and third LEDs 43 so that a quantity of light emitted byfirst LED 41, second LEDs 42, and third LEDs 43 is controlled by currentprovided to first LED 41, second LEDs 42, and third LEDs 43,respectively. LEDs 40 can be controlled using pulse width modulation toprovide a variable LED 40 brightness over time.

Referring to FIG. 3, according to some embodiments of the presentdisclosure, first, second, and third LEDs 41, 42, 43 each have differentlight-output efficiencies (e.g., external quantum efficiencies) withrespect to current density in the respective LED 40. According to someembodiments, the first, second, and third LEDs 41, 42, 43 can also havedifferent preferred driving voltages, for example a forward voltageacross the diode. As shown in FIG. 3, first LED 41 has a firstefficiency vs. current density 71, second LED 42 has a second efficiencyvs. current density 72, and third LED 43 has a third efficiency vs.current density 73. First efficiency vs. current density 71 has a firstefficiency maximum 71M, second efficiency vs. current density 72 has asecond efficiency maximum 72M, and third efficiency vs. current density73 has an approximate third efficiency maximum 73M (that can be at agreater current density than is shown in FIG. 3, given the limited dataset acquired and plotted in FIG. 3, e.g., of about 4-5%).

As shown in FIG. 3, second LED 42 has second efficiency maximum 72M at alower current density than first efficiency maximum 71M. Both first andsecond efficiency maximums 71M and 72M are at a lower current densitythan third efficiency maximum 73M. Thus, according to some embodimentsof the present disclosure, first LED 41 has a first efficiency 71 thatis current or current density dependent, second LEDs 42 each have asecond efficiency 72 that is current or current density dependent, thirdLEDs 43 each have a third efficiency 73 that is current or currentdensity dependent and, as illustrated in FIG. 3, second efficiency 72reaches a maximum 72M at a smaller current or current density than firstefficiency maximum 71M, second efficiency 72 reaches a maximum 72M at asmaller current or current density than third efficiency maximum 73M,and first efficiency 71 reaches a maximum 71M at a smaller current orcurrent density than third efficiency maximum 73M. Furthermore, secondefficiency maximum 72M can be at a current or current density that isapproximately one half of first efficiency maximum 71M. Therefore, ifcurrent is supplied to both first and second sub-pixels 31, 32 at firstefficiency maximum 71M, and if second sub-pixel 32 comprises two secondLEDs 42 electrically connected in parallel, the electrical current thatpasses through each second LED 42 will be one half the electricalcurrent that passes through first LED 41 and the current density passingthrough second LED 42 will likewise be one half that of the currentdensity passing through first LED 41. In this configuration, both firstLED 41 and second LED 42 can operate at approximately maximum efficiencywhile using the same current supplied by a common current supply,improving display 99 efficiency. (Both current and current density arereferenced since, if LEDs 40 are the same size, current and currentdensity are directly related, but size need not be the same.)

As shown in FIG. 3, third LED 43 can be less efficient than first orsecond LEDs 41, 42 at a given current density. Moreover, according tosome embodiments, third LEDs 43 can operate at a lower voltage thanfirst or second LEDs 41, 42. For example, blue-light-emitting materialscan emit light at voltages ranging from 2.5-3.7 volts,green-light-emitting materials can emit light at voltages ranging from1.9-4 volts, and red-light-emitting materials can emit light at voltagesranging from 1.6-2 volts. Thus, first and second LEDs 41, 42 can operateeffectively at a common voltage (e.g., 3.6 volts) but third LEDs 43 canrequire, or perform better at, a different voltage. Providing suchdifferent voltages can require additional control or power circuitry.Therefore, according to some embodiments of the present disclosure, adisplay controller 50 or pixel controller 52 supplies pixels 20 andsub-pixels 30 with a common voltage and multiple third LEDs 43 in thirdsub-pixel 33 are electrically connected in series. For example, if twothird LEDs 43 are connected in series at a given voltage, each of thirdLEDs 43 can be driven at one half the given voltage. For example, if 3.6volts is provided to first, second, and third sub-pixels 31, 32, 33,first and second LEDs 41, 42 are driven at 3.6 volts and two third LEDs43 are each driven at 1.8 volts because they are electrically connectedin series. Thus, in some embodiments, voltage provided to eachindividual third LEDs 43 is less than the voltage provided to first orsecond LEDs 41, 42, for example no greater than one half, one third, orone quarter of the voltage provided to first or second LEDs 41, 42depending on the number of third LEDs 43 in third sub-pixel 33 and theirelectrical connection.

According to some embodiments of the present disclosure, displaycontroller 50 provides a voltage and current to first LED 41, secondLEDs 42, and third LEDs 43 and the voltage provided to each of thirdLEDs 43 individually is less than the voltage provided to each first orsecond LED 41, 42 individually. Therefore, according to some embodimentsof the present disclosure, a common voltage supplied to all of first,second, and third sub-pixels 31, 32, 33 can relatively efficiently driveall of first, second, and third LEDs 41, 42, 43 and a common currentsupplied to all of first, second, and third sub-pixels 31, 32, 33 canrelatively efficiently drive all of first, second, and third LEDs 41,42, 43. Hence, display controller 50 or pixel controller 52 canefficiently control all of first, second, and third sub-pixels 31, 32,33 and first, second, and third LEDs 41, 42, 43 with a single controllerpower supply, reducing the cost of control circuits for display 99.Because, first, second, and third LEDs 41, 42, 43 are each mostefficiently driven at a single current density (although the currentdensities can be different for each of first, second, and third LEDs 41,42, 43), it can be advantageous to drive pixels 20 with a temporallymodulated control scheme such as pulse width modulation (PWM) so thatneither the voltage nor the current is varied when driving each offirst, second, and third LEDs 41, 42, 43.

In some embodiments of the present disclosure, first, second, and thirdsub-pixels 31, 32, 33 are driven at a greater voltage, for example toimprove power distribution over a display substrate 10 of display 99. Insome such embodiments, for example as shown in FIG. 4, first sub-pixel31 comprises two first LEDs 41 connected in series and second sub-pixel32 comprises four second LEDs 42 arranged in pairs. The pairs areelectrically connected in series and second LEDs 42 within each pair iselectrically connected in parallel. Third sub-pixel 33 can comprise fourthird LEDs 43 all electrically connected in a single series. Such anarrangement can be driven at twice the voltage of the configuration ofFIG. 1, for example 7.2 volts, and achieve the same relative voltage forall of the first, second, and third LEDs 41, 42, 43 and the same currentdensity distribution for first, second, and third LEDs 41, 42, 43, asshown in FIG. 1.

In some embodiments of the present disclosure, a multi-color LED display99 comprises pixels 20. Each pixel 20 comprises a first sub-pixel 31, asecond sub-pixel 32, and a third sub-pixel 33. First sub-pixel 31comprises first light-emitting diodes (LEDs) 41 (e.g., two or more firstLEDs 41) that each emit a first color of light. Second sub-pixel 32comprises second LEDs 42 (e.g., two or more second LEDs 42 such as foursecond LEDs 42) that emit a second color of light different from thefirst color of light. Third sub-pixel 33 comprises third LEDs 43 (e.g.,two or more third LEDs 43 such as four third LEDs 43) that emit a thirdcolor of light different from the first color of light and differentfrom the second color of light. At least two first LEDs 41 areelectrically connected in series; at least two second LEDs 42 areelectrically connected in parallel (e.g., pairs of serially connectedsecond LEDs 42 are electrically connected in parallel); and at least twothird LEDs 43 (e.g., all of third LEDs 43) are electrically connected inseries. Second sub-pixel 32 can comprise more second LEDs 42 than firstsub-pixel 31 comprises first LEDs 41 and third sub-pixel 33 can comprisemore third LEDs 43 than first sub-pixel 31 comprises first LEDs 41.

Because the third efficiency maximum 73M of third LEDs 43 can occur atmuch greater current density than that of either first or secondefficiency maximums 71M, 72M, in some embodiments first and secondsub-pixels 31, 32 are replicated in parallel within a pixel 20. In somesuch embodiments, for example as shown in FIG. 5, first sub-pixel 31comprises two first LEDs 41 electrically connected in parallel andsecond sub-pixel 32 comprises four second LEDs 42 electrically connectedin parallel. Third sub-pixel 33 can comprise two or more third LEDs 43all electrically connected in a single series. Such an arrangement canbe driven at the same voltage as the configuration of FIG. 1, forexample 3.6 volts, and achieve the same relative voltage for all offirst, second, and third LEDs 41, 42, 43 but the current or currentdensity of third LEDs 43 is twice that of first LEDs 41 and four timesthat of second LEDs 42, improving the relative efficiency of third LEDs43 and of display 99 as a whole. Thus, in some embodiments, electricalcurrent provided to each of third LEDs 43 is no less than twice thecurrent provided to each of first or second LEDs 41, 42. In someembodiments, the current density is adjusted to optimize the performanceof pixels 20 in total, rather than optimizing the current density for aparticular first, second, or third sub-pixel 31, 32, 33.

In some embodiments of the present disclosure, a multi-color LED display99 comprises pixels 20. Each pixel 20 comprises a first sub-pixel 31, asecond sub-pixel 32, and a third sub-pixel 33. First sub-pixel 31comprises first light-emitting diodes (LEDs) 41 (e.g., two or more firstLEDs 41) that each emit a first color of light. Second sub-pixel 32comprises second LEDs 42 (e.g., two or more second LEDs 42) that emit asecond color of light different from the first color of light. At leasttwo first LEDs 41 are electrically connected in parallel, more than twosecond LEDs 42 are electrically connected in parallel, and two or morethird LEDs 43 are electrically connected in series. Second sub-pixel 32can comprise more second LEDs 42 than first LEDs 41 in first sub-pixel31 and third sub-pixel 33 can comprise more serially connected thirdLEDs 43 than serially connected first LEDs in first sub-pixel 31.

According to some embodiments of the present disclosure, and asillustrated in FIGS. 4 and 5, a multi-color display 99 comprises onefirst LED 41 (or multiple first LEDs 41 connected in series) and secondLEDs 42 connected in parallel. Display 99 can comprise more second LEDs42 than first LEDs 41. According to some embodiments of the presentdisclosure, a multi-color display 99 comprises one first LED 41 (ormultiple first LEDs 41 connected in series) and third LEDs 43 connectedin series. Display 99 can comprise more third LEDs 43 than first LEDs41. Similarly, according to some embodiments of the present disclosure,multi-color LED display 99 comprises one first LED 41 (or multiple firstLEDs 41 connected in parallel) and second LEDs 42 connected in parallel.Display 99 can comprise more second LEDs 42 than first LEDs 41.According to some embodiments of the present disclosure, a multi-colorLED display 99 comprises one first LED 41 (or multiple first LEDs 41connected in parallel) and third LEDs 43 connected in series. Display 99can comprise more third LEDs 43 than first LEDs 41.

Referring to FIG. 6, in some embodiments, the efficiency of pixel 20 andrelative efficiencies of sub-pixels 30 are controlled by controlling arelative area or volume of the first, second, and third LEDs 41, 42, 43,for example the light-emitting area or volume. In some embodiments ofinorganic LEDs 40, for example in accordance with FIG. 3, second LEDs 42operate most efficiently at a smaller current density than first LEDs 41operate. A smaller current density in a single LED 40 at a given currentcan be achieved by increasing the relative size of the light-emittingarea or volume of single LED 40. Therefore, according to someembodiments of the present disclosure, large second LEDs 42L comprise alarger light-emitting area or volume than first LEDs 41, for examplelarge second LEDs 42L are larger than first LEDs 41 (e.g., have a largerextent over display substrate 10). Similarly, in some embodiments ofinorganic LEDs in accordance with FIG. 3, third LEDs 43 operate mostefficiently at a greater current density than first LEDs 41 operate. Agreater current density in a single LED 40 at a given current can beachieved by decreasing the relative size of the light-emitting area orvolume of single LED 40. Therefore, according to some embodiments of thepresent disclosure, small third LEDs 43S comprise a smallerlight-emitting area or volume than first LEDs 41, for example smallthird LEDs 43S are smaller than first LEDs 41. According to someembodiments of the present disclosure, a ratio of the light-emittingarea or volume of second LED 42 with respect to the light-emitting areaor volume of first LED 41 is similar to, dependent upon, approximatelyequal to, or substantially the same as a ratio of first efficiencymaximum 71M to second efficiency maximum 72M. Similarly, according tosome embodiments of the present disclosure, a ratio of thelight-emitting area or volume of third LED 43 with respect to thelight-emitting area or volume of first LED 41 is similar to, dependentupon, approximately equal to, or substantially the same as the ratio offirst efficiency maximum 71M to third efficiency maximum 73M. Thus, thelight-emitting area or volume of pairs of differently sized LEDs 40 canbe inversely related to the efficiency maximums of the pairs of LEDs 40.The relative sizes of LEDs 40 in FIG. 6 is represented by differentlysized LED graphic elements. In some configurations, third LEDs 43 caneach have a width and length of 8 by 15 microns, first LED 41 can have awidth and length of 12 by 20 microns, and second LEDs 42 can have awidth and length of 16 by 30 microns, or arithmetic multiples thereof.In some configurations, third LEDs 43 can each have a width and lengthof 8 by 15 microns, first LED 41 can have a width and length of 16 by 30microns, and second LEDs 42 can have a width and length of 24 by 40microns, or arithmetic multiples thereof. Using one first LED 41 infirst sub-pixel 31, one second LED 42 in second sub-pixel 32, and onethird LED 43 in third sub-pixel 33 in a pixel 20 reduces the totalnumber of LEDs 40 in a pixel 20 and reduces the number of assemblysteps.

Because some multi-color displays 99 of the present disclosure cancomprise micro-LEDs in a pixel 20 spatially disposed close together,pixels 20 can provide excellent color mixing and good display resolutiondespite the use of multiple micro-LEDs in a pixel 20 or in first,second, or third sub-pixels 31, 32, 33. For example, in someembodiments, the unaided human visual system is not capable of spatiallydistinguishing first, second, and third LEDs 41, 42, 43 in a pixel 20 ata designed viewing distance, for example even if the number of first,second, and third LEDs is different in at least one pixel.

In of the present disclosure, a multi-color LED display 99 comprisespixels 20. Each pixel 20 comprises a first sub-pixel 31, a secondsub-pixel 32, and a third sub-pixel 33. First sub-pixel 31 can comprisea first light-emitting diode (LED) 41 that emits a first color of light.Second sub-pixel 32 can comprise a second larger LED 42L that emits asecond color of light different from the first color of light. Thirdsub-pixel 33 can comprise a third smaller LED 43S that emits a thirdcolor of light different from the first color of light and differentfrom the second color of light. First LED 41 comprises a firstlight-emitting area or volume, second larger LED 42L comprises a secondlight-emitting area or volume, and third smaller LED 43S comprises athird light-emitting area or volume. The second light-emitting area orvolume is larger than the first light-emitting area or volume and thethird light-emitting area or volume is smaller than the firstlight-emitting area or volume.

According to some embodiments of the present disclosure, a multi-colordisplay 99 comprises a display substrate 10, an array 22 of pixels 20disposed on display substrate 10 with a controller (e.g., a displaycontroller 50 or pixel controller 52) connected to each of pixels 20 tocontrol pixels 20. In some embodiments, a separate controller (e.g.,pixel controller 52) is connected to each of pixel 20 to control pixel20. According to some embodiments of the present disclosure, amulti-color inorganic light-emitting diode (iLED) pixel 20 iselectrically connected to a common voltage signal 54 and a common groundsignal 56 that can be provided in parallel to all pixels 20 inmulti-color display 99. An LED 40 (e.g., first LED 41, second LED 42,and third LED 43) is a light-emitting device that comprisestwo-terminals that emits light when provided with forward-biasedelectrical current across the two terminals at a sufficient voltage andwith sufficient current. An LED 40 can be an inorganic LED 40.

As used herein, two LEDs 40 that are serially connected are two LEDs 40that are electrically connected in serial so that a first terminal of anLED 40 is electrically connected to a second terminal of another LED 40.Another of the terminals of each of the two LEDs 40 is electricallyconnected to common voltage signal 54 or common ground signal 56 and acontrol signal (e.g., first current control signal 61, second currentcontrol signal 62, or third current control signal 63), respectively.First terminals of two LEDs 40 that are electrically connected inparallel are connected together and second terminals of the twoparallel-connected LEDs 40 are likewise connected together. The firstand second terminals are electrically connected to common voltage signal54 or common ground signal 56 and a control signal (e.g., first currentcontrol signal 61, second current control signal 62, or third currentcontrol signal 63), respectively. Both LEDs 40 are biased in the sameforward direction. When one or more LEDs 40 is only one LED 40, one LED40 being serially connected (or parallel connected) means LED 40 issimply electrically connected, by itself, to common voltage signal 54 orcommon ground signal 56 and a control signal (e.g., first currentcontrol signal 61, second current control signal 62, or third currentcontrol signal 63), respectively.

According to some embodiments of the present disclosure, a common powersupply or power connection (common voltage signal 54) provides power ata common voltage to all of LEDs 40 in multi-color LED pixel 20. However,the common voltage is not well suited to at least one individual LED 40.For example, third LED 43 (e.g., a red iLED 43) can require a voltage of2.075 V and operate at a current of 0.36 μA, second LED 42 (e.g., agreen iLED 42) can have a voltage of 3.308 V and operate at a current of0.204 μA, and first LED 41 (e.g., a blue iLED 41) can have a voltage of2.921 V and operate at a current of 0.112 μA for best efficiency. Aconventional arrangement having one LED 40 of each color in eachmulti-color pixel 20 and a common power supply will waste 0.487 μW. Incontrast, some embodiments of the present disclosure have improvedefficiency (e.g., reduced lost power), depending on the relativeefficiency maximums of LEDs 40 and the number of LEDs 40 electricallyconnected in parallel or in serial.

Referring to FIG. 7, in some embodiments of the present disclosure, amulti-color display 99 includes a plurality of multi-color LED pixels20. (In FIG. 7, color sub-pixels 30, e.g., first, second, and thirdsub-pixels 31, 32, 33, are illustrated, but not LEDs 40 within colorsub-pixels 30.) The plurality of multi-color LED pixels 20 are arrangedin a pixel array 22 on, over, or in display substrate 10. A pixelcontroller 52 (not shown in FIG. 7) provides control signals forcontrolling color sub-pixels 30 to emit a desired amount of light fromeach color sub-pixel 30. Each pixel 20 can be disposed on a pixelsubstrate 12 and each pixel substrate 12 can be disposed on displaysubstrate 10. Sub-pixels 30 of each pixel 20 can be electricallyinterconnected on pixel substrate 12 at a higher resolution than pixels20 are electrically interconnected on display substrate 10.

As shown in the flow diagram of FIG. 8, the cross sections of FIGS.9-11, and the perspective of FIG. 12, micro-LEDs 40 (e.g., first,second, or third LEDs 41, 42, 43) can be disposed in a pixel 20 bymicro-transfer printing, for example using a visco-elastic stamp withposts that each contact a micro-LED 40 connected to a source waferanchor 258 with a tether 256 to fracture or separate tethers 256 (shownin FIG. 9), remove micro-LEDs 40 from the source wafer (shown in FIG.10), and adhere micro-LEDs 40 to the posts. The stamp then depositsmicro-LEDs 40 on the posts onto a target substrate, such as displaysubstrate 10 or a pixel substrate 12 (shown in FIGS. 11 and 12). Such amicro-transfer printing process enables high-resolution displays 99 withpixels 20 and first, second, and third inorganic micro-LEDs 41, 42, 43according to some embodiments of the present disclosure.

Referring to the flow diagram of FIG. 8, a method of making amulti-color display 99 includes providing a display substrate 10 in step100. A common power (voltage) signal 54 and a common ground signal 56are disposed on display substrate 10 (shown in FIG. 7) in step 105.Alternatively, display substrate 10 can be provided with common voltagesignal 54 and common ground signal 56 in place in step 100. Referringalso to FIG. 9, in step 110 an intermediate substrate 250 is providedfor example as a semiconductor or glass wafer. Intermediate substrate250 can have a patterned sacrificial layer 252 defining sacrificialportions 254 and anchors 258 with tethers 256 physically connectingpixel 20 (or LED 40) to anchor 258. Although a variety of methods can beused to form connection posts 240, in some embodiments a connection postform is made in sacrificial portion 254 for each connection post 240 instep 130, for example by etching. The connection post form can be apyramidal depression or other depression with a suitable cross section(e.g., a conical depression). Connection posts 240 are then constructedin step 140 by forming a patterned metal layer over the form. Apatterned dielectric layer 224 is formed over patterned sacrificiallayer 252 with a via made through patterned dielectric layer 224 and anopening for etching sacrificial portions 254.

In step 120, one or more wafers each having an array of micro-transferprintable circuit chiplets, for example LEDs 40 or active-matrix pixelcontroller 52 circuits are provided. Each wafer can be made usingdifferent materials and process technologies, so that the chiplets are aheterogeneous group of chiplets. In particular, the wafers can be sourcewafers for the different first, second, and third (blue, green, and red)LEDs 41, 42, 43 and pixel controller 52 and be made of differentcompound semiconductor or single semiconductor materials.

An inorganic LED 40 (e.g., any one or more of first, second, and thirdLEDs 41, 42, 43) is micro-transfer printed onto patterned dielectriclayer 224 from a source wafer in step 150. A patterned dielectricstructure 225 is formed to insulate LEDs 40 and provide vias for LEDcontacts 223, and electrodes 228 are patterned over iLED contacts 223and dielectric structure 225 in electrical contact with connection posts240 in step 160. A plurality of inorganic LEDs 40 may be micro-transferprinted and electrically connected in steps 150 and 160. In someembodiments, wires are formed in step 160 to electrically connect thecircuit chiplets to each other and connection posts 240, for exampleusing photolithographic processes and materials. An encapsulation layer226 can be provided to protect the structure from environmental ormechanical damage. The structures and layers illustrated in FIG. 9 canbe made using integrated circuit and display industry materials andmethods.

The micro-transfer printable circuit chiplets micro-transfer printed instep 150 onto intermediate substrate 250 are printed using a transferstamp to press against the micro-transfer printable circuit chiplets onthe respective source wafers to break (e.g., fracture) or separatetethers on the source wafer and adhere the circuit chiplets to thetransfer stamp. The stamp is then moved to intermediate substrate 250and the circuit chiplets pressed against and adhered to intermediatesubstrate 250. Intermediate substrate 250 can have an adhesive layer(not shown). In certain embodiments, after the circuit chiplets aredisposed on the adhesive layer, the adhesive layer can be cured. In someembodiments, multiple multi-color inorganic light-emitting diode pixels20, each including LEDs 40 and a pixel controller 52, are disposed onintermediate substrate 250, and can be disposed in common steps, forexample micro-transfer printing many LEDs 40 from a common source waferto intermediate substrate 250 in one printing procedure ormicro-transfer printing many pixel controllers 52 from a common sourcewafer to intermediate substrate 250 in one printing procedure.

In step 170, sacrificial portions 254 of intermediate substrate 250 areetched to release full-color pixels 20 from intermediate substrate 250(as shown in FIG. 10) and full-color pixels 20 are, in turn,micro-transfer printed in step 180 onto display substrate 10. Tether 256is illustrated as fractured in FIG. 10. As shown in FIG. 11, connectionposts 240 are electrically connected to display contact pads 238electrically connected to or part of common power, ground signals 54, 56or control signals on display substrate 10 (shown in FIG. 7). Ingeneral, sacrificial portions 254 can be etched to form tethers 256connecting LED 40 or other pixel component, such as pixel controller 52to anchor 258 and a gap between the circuit element and the sourcewafer, enabling the circuit element to be micro-transfer printed withthe transfer stamp by fracturing tethers 256 to adhere the circuitelement to the stamp, transporting the stamp to a destination substratesuch as the display substrate 10, and pressing the circuit elements tothe destination substrate to adhere the circuit elements to thedestination substrate. LEDs 40, pixels 20, or other pixel component,such as pixel controller 52, can be connected to intermediate substrate250 by one or more tethers 256, each of which is broken (e.g.,fractured) or separated during micro-transfer printing. Sacrificialportions 254 can be, for example, an oxide layer or a designatedanisotropically etchable portion of the source wafer, or, once etched,the gap between the circuit element and the substrate or wafer.

In some embodiments of the present disclosure, and as illustrated inFIG. 12, a plurality of pixels 20 is provided on display substrate 10 toform a multi-color display 99. At least some of pixels 20 can beprovided in common steps and at the same time in a common micro-transferprinting step.

Micro-transfer printed chiplets, for example LEDs 40 or active-matrixpixel control circuits, on intermediate substrate 250 can form afull-color pixel 20 including LEDs 40 that are controlled by pixelcontroller 52 with control signals. The control signals can be adaptedto control LEDs 40 to emit the desired amount of light from each colorsub-pixel 30, for example using pulse-width modulation. Each of LEDs 40or pixel controller 52 can be micro-transfer printed to intermediatesubstrate 250 or, if intermediate substrate 250 is a semiconductorsubstrate, a control circuit for controlling LEDs 40 can be formed inthe semiconductor substrate. In some embodiments, a method of thepresent disclosure can include providing an intermediate substrate 250,micro-transfer printing LEDs 40 from one or more source substrates tointermediate substrate 250 to form a full-color LED pixel 20. Full-colorLED pixels 20 on intermediate substrate 250 can then be micro-transferprinted to a display substrate 10 to form a multi-color display 99.

According to some embodiments of the present disclosure, displaysubstrate 10 is a substrate having substantially parallel opposingsides, on, over, or in one of which color pixels 20 are disposed.Display substrate 10 can be a glass, polymer, ceramic, or metalsubstrate having at least one side suitable for constructing electricalconductors. Display substrate 10 can have a thickness, for example, from5 microns to 20 mm (e.g., 5 to 10 microns, 10 to 50 microns, 50 to 100microns, 100 to 200 microns, 200 to 500 microns, 500 microns to 0.5 mm,0.5 to 1 mm, 1 mm to 5 mm, 5 mm to 10 mm, or 10 mm to 20 mm) or largerand can be, but is not necessarily, transparent (e.g., having at least50% transparency).

Common power and ground signals 54, 56 can be made usingphotolithographic, printed circuit board, inkjet, or display techniquesand materials, for example using copper, aluminum, or silver materialsto form patterned electrical conductors that conduct electrical controland power signals 54 to pixels 20 to enable pixels 20 to displayinformation, for example an image. The electrical conductors can beelectrically conductive metal wires formed, or disposed on, displaysubstrate 10 using, for example, photolithographic methods, tools, andmaterials. Similarly, electrodes 228 can be made using photolithographicmethods, tools, and materials.

Intermediate substrate 250 can also be glass or plastic or can be asemiconductor, such as silicon. Intermediate and display substrates 250,10 can be transparent or opaque and, if transparent, light emitted fromLEDs 40 can be transmitted through intermediate or display substrates250, 10, depending on the orientation and structure of intermediate ordisplay substrates 250, 10.

The source wafers can be compound semiconductor or silicon wafers andpatterned sacrificial layer 252, tethers 256, and circuit elementstructures can be made using photolithographic methods and materialsfound in the integrated circuit industries. For example, a source wafercan be GaN, InGaN, or GaAs. Inorganic light-emitting diodes 40 can beinorganic light-emitting diodes made in a semiconductor material, suchas a compound semiconductor (e.g., GaN or GaAs, with or without doping).The semiconductor material can be crystalline. Any one or each of LEDs40 can have at least one of a width from 2 to 50 μm (e.g., 2 to 5 pm, 5to 10 pm, 10 to 20 μm, or 20 to 50 μm), a length from 2 to 50 μm (e.g.,2 to 5 μm, 5 to 10 μm, 10 to 20 μm, or 20 to 50 μm), and a height from 2to 50 μm (e.g., 2 to 5 μm, 5 to 10 μm, 10 to 20 μm, or 20 to 50 μm).

In operation, power 54, ground 56, and control signals (e.g., rowsignals 24, column signals 26) are applied to electrical conductors ondisplay substrate 10. In some embodiments, electrical conductors ondisplay substrate 10 are in electrical contact with connection posts 240of multi-color LED pixels 20 and supply electrical power at a desiredvoltage to common power signal 54, supply an electrical ground to commonground signal 56, and supply control signals to other connection posts240. The ground, voltage, and control signals are electrically conductedby connection posts 240 and electrodes 228 to LEDs 40 and pixelcontroller 52 to control LEDs 40 to emit light. LEDs 40 can becontrolled using passive-matrix or active-matrix methods.

Methods of forming useful micro-transfer printable structures aredescribed, for example, in the paper “AMOLED Displays usingTransfer-Printed Integrated Circuits,” published in the Proceedings ofthe 2009 Society for Information Display International Symposium Jun.2-5, 2009, in San Antonio Tex., US, vol. 40, Book 2, ISSN 0009-0966X,paper 63.2 p. 947 and U.S. Pat. No. 8,889,485. For a discussion ofmicro-transfer printing techniques see, U.S. Pat. Nos. 8,722,458,7,622,367 and 8,506,867, the disclosures of which are herebyincorporated by reference in their entirety. Micro-transfer printingusing compound micro-assembly structures and methods can also be usedwith the present disclosure, for example, as described in U.S. patentapplication Ser. No. 14/822,868, filed Aug. 10, 2015, entitled CompoundMicro-Assembly Strategies and Devices, the disclosure of which is herebyincorporated by reference in its entirety. In some embodiments, pixel 20is a compound micro-assembled device.

According to various embodiments of the present disclosure, sourcewafers can be provided with LEDs 40, release layers (patternedsacrificial layers 252), tethers 256, and connection posts 240 alreadyformed, or they can be constructed during display fabrication.Similarly, any source wafers having micro-transfer printable LEDs 40thereon can be constructed or transfer printed during displayfabrication.

Connection posts 240 can be electrical connections formed on a side of amicro-transfer printable element such as LED 40, circuit element, orpixel 20 that extend generally perpendicular to a surface of theelement. Such connection posts 240 can be formed from metals such asaluminum, titanium, tungsten, copper, silver, gold, or other conductivemetals. In some embodiments, connection posts 240 are made of one ormore high elastic modulus metals, such as tungsten. As used herein, ahigh elastic modulus is an elastic modulus sufficient to maintainfunction and structure of the connection posts 240 when pressed into adisplay substrate 10 electrical conductors that can include displaycontact pads 238.

Display substrate 10 contact pads 238 can be made of or include arelatively soft metal, such as tin, solder, or tin-based solder, toassist in forming good electrical contact with connection posts 240 andadhesion with the elements. As used herein, a soft metal may refer to ametal into which a connection post 240 can be pressed to form anelectrical connection between connection post 240 and display contactpads 238. In this arrangement, display contact pads 238 can plasticallydeform and flow under mechanical pressure to provide a good electricalconnection between connection post 240 and display contact pads 238.

In some embodiments of the present disclosure, connection posts 240 caninclude a soft metal and display contact pads 238 include a high elasticmodulus metal. In some such configurations, connection posts 240 canplastically deform and flow under mechanical pressure to provide a goodelectrical connection between connection post 240 and display contactpads 238.

If an optional layer of adhesive is formed on display substrate 10,connection posts 240 can be driven through the adhesive layer to form anelectrical connection with display contact pads 238 beneath the adhesivelayer. In certain embodiments, the adhesive layer can be cured to morefirmly adhere the element and maintain a robust electrical connectionbetween connection posts 240 and display contact pads 238 in thepresence of mechanical stress. In certain embodiments, the adhesivelayer undergoes some shrinkage during the curing process that canfurther strengthen the electrical connectivity and adhesion betweenconnection post 240 and display contact pads 238.

In certain embodiments of the present disclosure, connection posts 240are in contact with, are embedded in, or pierce display contact pads 238of the element. In some embodiments, either or both one or more ofconnection posts 240 and display contact pads 238 are deformed orcrumpled into a non-planar shape or are deformed so that the surfaces ofconnection posts 240 and display contact pads 238 change shape oncontact with each other. The deformation or crumpling can improve theelectrical connection between connection posts 240 and display contactpads 238 by increasing the surface area that is in contact betweenconnection posts 240 and display contact pads 238. To facilitatedeformation, in some embodiments, connection posts 240 have acomposition softer than that of display contact pads 238 or displaycontact pads 238 have a composition softer than connection posts 240.

Micro-transfer printable elements can be constructed using foundryfabrication processes used in the art. Layers of materials can be used,including materials such as metals, oxides, nitrides and other materialsused in the integrated-circuit art. Each element can be or include acomplete semiconductor integrated circuit and can include, for example,transistors. The elements can have different sizes, for example, from1000 square microns to 10,000 square microns, 100,000 square microns, or1 square mm, or larger, and can have one of a range of aspect ratios,for example at least 1:1, 2:1, 5:1, or 10:1. The elements can berectangular or can have other shapes.

Some embodiments of the present disclosure provide advantages over otherprinting methods described in the prior art. By employing connectionposts 240 and a printing method that provides micro-transfer printableelement on a destination substrate and connection posts 240 adjacent tothe destination substrate, a low-cost method for printing elements inlarge quantities over a destination substrate (e.g., display substrate10) is provided. Furthermore, in some embodiments, additional processsteps for electrically connecting the micro-transfer printable elementsto the destination substrate are obviated.

An element source wafer and micro-transfer printable elements,micro-transfer printing stamps, and destination substrates can be madeseparately and at different times or in different temporal orders orlocations and provided in various process states.

The method of some embodiments of the present disclosure can beiteratively applied to a single or multiple destination substrates. Byrepeatedly transferring sub-arrays of micro-transfer printable elementsfrom a transfer stamp to a destination substrate and relatively movingthe transfer stamp and destination substrates between stampingoperations size of the selected micro-transfer printable elements in thetransferred sub-array between each transfer of micro-transfer printableelements, an array of micro-transfer printable elements formed at a highdensity on a source wafer (e.g., intermediate wafer 250) can betransferred to a destination substrate (e.g., display substrate 10) at amuch lower density. In practice, the source wafer is likely to beexpensive, and forming micro-transfer printable elements with a highdensity on the source wafer will reduce the cost of the micro-transferprintable elements, especially as compared to micro-transfer printableelements on the destination substrate.

In particular, in a case wherein active micro-transfer printableelements are or include an integrated circuit formed in a crystallinesemiconductor material, the integrated circuit substrate providessufficient cohesion, strength, and flexibility that it can adhere to thedestination substrate without breaking as the transfer stamp is removed.

In comparison to thin-film manufacturing methods, using denselypopulated source substrate wafers and transferring micro-transferprintable elements to a destination substrate that requires only asparse array of micro-transfer printable elements located thereon doesnot waste or require active layer material on a destination substrate.The present disclosure can also be used in transferring micro-transferprintable elements made with crystalline semiconductor materials thathave higher performance than thin-film active components. Furthermore,the flatness, smoothness, chemical stability, and heat stabilityrequirements for a destination substrate used in embodiments of thepresent disclosure may be reduced because the adhesion and transferprocess is not substantially limited by the material properties of thedestination substrate. Manufacturing and material costs may be reducedbecause of high utilization rates of more expensive materials (e.g., thesource substrate) and reduced material and processing requirements forthe destination substrate.

As is understood by those skilled in the art, the terms “over” and“under” are relative terms and can be interchanged in reference todifferent orientations of the layers, elements, and substrates includedin the present disclosure. For example, a first layer on a second layer,in some implementations means a first layer directly on and in contactwith a second layer. In other implementations a first layer on a secondlayer includes a first layer and a second layer with another layertherebetween.

Having described certain implementations of embodiments, it will nowbecome apparent to one of skill in the art that other implementationsincorporating the concepts of the disclosure may be used. Therefore, thedisclosure should not be limited to certain implementations, but rathershould be limited only by the spirit and scope of the following claims.

Throughout the description, where apparatus and systems are described ashaving, including, or comprising specific components, or where processesand methods are described as having, including, or comprising specificsteps, it is contemplated that, additionally, there are apparatus, andsystems of the disclosed technology that consist essentially of, orconsist of, the recited components, and that there are processes andmethods according to the disclosed technology that consist essentiallyof, or consist of, the recited processing steps.

It should be understood that the order of steps or order for performingcertain action is immaterial so long as the disclosed technology remainsoperable. Moreover, two or more steps or actions in some circumstancescan be conducted simultaneously. The disclosure has been described indetail with particular reference to certain embodiments thereof, but itwill be understood that variations and modifications can be effectedwithin the spirit and scope of the following claims.

PARTS LIST

10 display substrate

12 pixel substrate

20 pixels

22 array

24 row wire/row signal

26 column wire/column signal

30 sub-pixel

31 first sub-pixel

32 second sub-pixel

33 third sub-pixel

40 LED/iLED/micro-LED

41 first LED/blue LED

42 second LED/green LED

42L large second LED

43 third LED/red LED

43S small third LED

50 display controller

52 pixel controller

54 power/voltage signal

56 ground

61 first current control signal

62 second current control signal

63 third current control signal

71 first efficiency vs. current density/efficiency

71M first efficiency maximum

72 second efficiency vs. current density/efficiency

72M second efficiency maximum

73 third efficiency vs. current density/efficiency

73M third efficiency maximum

99 display

100 provide display substrate step

105 form voltage and ground signals step

110 provide intermediate substrate step

120 provide wafer with chiplets step

130 form connection post templates step

140 form connection posts and vias step

150 print chiplets onto intermediate substrate step

160 form wires step

170 etch intermediate substrate step

180 print pixels onto display substrate step

223 LED contact

224 patterned dielectric layer

225 dielectric structure

226 encapsulation layer

228 electrode

238 display contact pad

240 connection post

250 intermediate substrate

252 patterned sacrificial layer

254 sacrificial portion

256 tether

258 anchor

1-23. (canceled)
 24. A multi-color LED display, comprising: pixels, eachof the pixels comprising a first sub-pixel, a second sub-pixel, and athird sub-pixel, the first sub-pixel comprising first light-emittingdiodes (LEDs) that emit a first color of light, the second sub-pixelcomprising second LEDs that emit a second color of light different fromthe first color of light, and the third sub-pixel comprising third LEDsthat emit a third color of light different from the first color of lightand different from the second color of light, wherein at least two ofthe first LEDs are electrically connected in parallel, more than two ofthe second LEDs are electrically connected in parallel, and more thantwo of the third LEDs are electrically connected in series, and whereinthe second sub-pixel comprises more second LEDs than first LEDs in thefirst sub-pixel and the third sub-pixel comprises more third LEDs thanfirst LEDs in the first sub-pixel.
 25. A multi-color LED display,comprising: pixels, each of the pixels comprising a first sub-pixel, asecond sub-pixel, and a third sub-pixel, the first sub-pixel comprisinga first inorganic light-emitting diode (LED) that emits a first color oflight, the second sub-pixel comprising a second inorganic LED that emitsa second color of light different from the first color of light, and thethird sub-pixel comprising a third inorganic LED that emits a thirdcolor of light different from the first color of light and differentfrom the second color of light, wherein the first LED has a firstlight-emitting area and volume, the second LED has a secondlight-emitting area and volume, and the third LED has a thirdlight-emitting area and volume, and at least one of the secondlight-emitting area and volume is larger than the first light-emittingarea and volume, respectively, and at least one of the thirdlight-emitting area and volume is smaller than the first light-emittingarea and volume, respectively.
 26. The multi-color display of claim 25,wherein (i) a ratio of at least one of the second light-emitting areaand volume to the first light-emitting area and volume, respectively, isdependent on a ratio of a first efficiency maximum of the first LED to asecond efficiency maximum of the second LED, (ii) a ratio of at leastone of the second light-emitting area and volume to the firstlight-emitting area and volume, respectively, is dependent on the ratioof the first efficiency maximum to the second efficiency maximum, or(iii) both (i) and (ii).
 27. The multi-color LED display of claim 25,wherein the first LED, the second LED, and the third LED are inorganicmicro-LEDs with at least one of a width and a length that is no greaterthan 500 microns.
 28. The multi-color LED display of claim 27, whereinthe first LED, the second LED, and the third LED are inorganicmicro-LEDs with at least one of a width and a length that is no greaterthan 200 microns.
 29. The multi-color display of claim 25, wherein thefirst LED is a blue LED that emits blue light, the second LED is greenLED that emits green light, and the third LED is a red LED that emitsred light.
 30. The multi-color display of claim 25, wherein the firstLED is more efficient than the second LED and the second LED is moreefficient than the third LED.
 31. The multi-color display of claim 25,wherein the first LED has a first efficiency that is current or currentdensity dependent, the second LED has a second efficiency that iscurrent or current density dependent, and the second efficiency of thesecond LED reaches a maximum at a smaller current or current densitythan the first efficiency.
 32. The multi-color display of claim 25,wherein the second LED has a second efficiency that is current orcurrent density dependent, the third LED has a third efficiency that iscurrent or current density dependent, and the second efficiency of thesecond LED reaches a maximum at a smaller current or current densitythan the third efficiency of the third LED.
 33. The multi-color displayof claim 25, wherein the first LED has a first efficiency that iscurrent dependent, the third LED has a third efficiency that is currentdependent, and the first efficiency reaches a maximum at a smallercurrent than the third efficiency of the third LED.
 34. The multi-colordisplay of claim 25, comprising a display controller electricallyconnected to the pixels that is operable to control the first LED, thesecond LED, and the third LED.
 35. The multi-color display of claim 34,wherein a voltage provided to the third LED is less than a voltageprovided to the first LED or to each of the second LEDs.
 36. Themulti-color display of claim 35, wherein a voltage provided to the thirdLED is no greater than one half a voltage provided to the first LED orto each of the second LEDs.
 37. The multi-color display of claim 34,wherein a current provided to the third LED is no less than twice acurrent provided to the first LED or to the second LED.
 38. Themulti-color display of claim 34, wherein the controller is operable toprovide a current source at a fixed voltage to the first LED, the secondLED, and the third LED, and wherein a quantity of light emitted by thefirst LED, the second LED, and the third LED is controlled by thecurrent provided to the first LED, the second LED, and the third LED,respectively.
 39. The multi-color LED display of claim 25, comprising: adisplay substrate on, in, or over which the pixels are disposed; and acontroller electrically connected to each of the pixels that is operableto control the pixels.
 40. A pixel comprising: a first sub-pixelcomprising a first inorganic light-emitting diode (LED) that emits afirst color of light; a second sub-pixel comprising second inorganicLEDs that emit a second color of light different from the first color oflight; and a third sub-pixel comprising third inorganic LEDs that emit athird color of light different from the first color of light anddifferent from the second color of light, wherein the second LEDs areelectrically connected in parallel and the third LEDs are electricallyconnected in series.